ReVera UHV Robot System

ReVera is a leading provider of next-generation metrology used to monitor and control films and critical layers deployed in the semiconductor manufacturing process. ReVera has developed a unique process for measuring semiconductor-device thin films and layers. As semiconductor features become smaller and smaller, optical measurement and inspection techniques become less reliable. To address that problem, ReVera created VeraFlex II, a High-K Metal Gate (HKMG) Production Metrology system.